Our ESD Chuck Table Blockis homogeneous moulded within the rubber/silicon mixture before the shape moulding process. Intact Pacific can control and guarantee a steady resistivity of 105 -10 9 Ω, which would not vary with time and usage.
3 important things to know before choosing ESD chuck table block
- If “ESD” protection is specified in the product, the standard ESD that are required will be a steady resistivity of 105 -10 9 Ω.
- Get the right material that is suitable for your work. Different material is served different purpose of the work environment e.g. work temperature, hardness and so on.
- JIS A is the hardness measurement standard that are widely used for determining the characteristics of rubber. The range of hardness is between 40-75 JIS A and can be adjusted upon the customer specification.
Please refer to the following table to choose the right material for your ESD chuck table block.
| Material | BSR Silicone | NBR | EPDM | FKM VITON |
|---|---|---|---|---|
| Hardness | 40-75 JIS A | 60-75 JIS A | 60-75 JIS A | 65-70 JIS A |
| Operating temperature | -50 to +200 °C | -25 to +180 °C | -25 to +200 °C | -25 to +250 °C |
ESD Chuck Table Block
| Model no. | X Axis (mm.) | Y Axis (mm.) | Thickness (mm.) |
|---|---|---|---|
| ECTB-260/80/3 | 80 | 260 | 3.0 |
| ECTB-260/80/6.0 | 80 | 260 | 6.0 |
| ECTB-260/80/6.1 | 110 | 300 | 6.1 |
| ECTB-260/80/8.0 | 70 | 260 | 8.0 |
| ECTB-260/80/9.3 | 80 | 260 | 9.3 |